应用光学, 2000, 21 (4): 5, 网络出版: 2006-05-19
透射式GaAs光电阴极激活技术研究
THE RESEARCH OF TRANSMISSIVE GaAs PHOTOCATHODE ACTIVE TECHNIQUE
摘要
通过对成像器件GaAs负电子亲合 势（NEA）光电阴极激活技术的研究，运用分析仪器进行工艺质量在线监测，在大、薄、匀 的GaAs外延层激活出的台内阴极灵敏度大于1300μA/lm。
Abstract
The sensitivity of in-mesa cathode activated on a large,thin and unifo rm GaAs epitaxial layer is up to better than 1300 μA/lm by the research of the active technique of GaAs NEA photocathodes for imaging devices and the on-line m ornitoring of precess quality.
徐江涛. 透射式GaAs光电阴极激活技术研究[J]. 应用光学, 2000, 21(4): 5. 徐江涛. THE RESEARCH OF TRANSMISSIVE GaAs PHOTOCATHODE ACTIVE TECHNIQUE[J]. Journal of Applied Optics, 2000, 21(4): 5.
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