应用光学, 2000, 21 (5): 1, 网络出版: 2006-05-19
二代微通道板(MCP)放气成份质谱分析
MASS SPECTRUM ANALYSIS OF RELEASING GAS COMPOSITION OF Ⅱ GENERATION MCP XU Jiang-tao
摘要
模拟二代微光管制管工艺,对MCP经不同工艺处理 后的放气 成份进行分析,发现工艺质量本身是造成MCP污染的主要因素。经改进工艺,提高了制管成品 率和管子性能。
Abstract
The releasing gas compositions of MCP processed by different technological proesses are analysed by the simulation of a tube makin g process of Ⅱ generation low-light level tube.
徐江涛. 二代微通道板(MCP)放气成份质谱分析[J]. 应用光学, 2000, 21(5): 1. 徐江涛. MASS SPECTRUM ANALYSIS OF RELEASING GAS COMPOSITION OF Ⅱ GENERATION MCP XU Jiang-tao[J]. Journal of Applied Optics, 2000, 21(5): 1.
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