应用光学, 2003, 24 (6): 5, 网络出版: 2006-05-19
质谱分析与检漏技术在成像器件研究中的应用
Application of Mass Spectrographic Analysis and Leak Detection in Research of Imaging Device
摘要
运用四极质谱计对微光成像器件的制管工艺质量进行大量质谱分析监测,分清了各道工序污染对制管的影响.通过对制管工艺进行改进,使制管成品率提高了50%.
Abstract
The quadrupole mass spectrometer has been successfully used in monitoring the technical quality in the whole course of the image tube fabrication.Possible contamination can be detected and cleand up to insure good production environment. The monitoring system is responsible for the rate of 50% increase of the final products.
徐江涛. 质谱分析与检漏技术在成像器件研究中的应用[J]. 应用光学, 2003, 24(6): 5. 徐江涛. Application of Mass Spectrographic Analysis and Leak Detection in Research of Imaging Device[J]. Journal of Applied Optics, 2003, 24(6): 5.
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