光散射学报, 2005, 17 (1): 19, 网络出版: 2006-05-19
利用发射光谱进行常压介质阻挡放电等离子体诊断及其在材料表面改性上的应用
Plasma Diagnostics ofDielectric Barrier Discharge at Atmospheric Pressure by Emission Spectroscopy and ItsApplication to Surface Modification of Materials
介质阻挡放电 等离子体诊断 发射光谱 大气压 表面改性 Dielectric barrier discharge (DBD) Plasma diagnostics Emissionspectroscopy Atmospheric pressure Surface modification
摘要
使用介质阻挡放电光谱诊断装置,对常压介质阻挡放电在材料改性过程中的等离子体发射光谱进行测量,记录和比较了空气、氦气和氩气常压介质阻档方电等离子体发射光谱,并运用氩元素谱线的相对强度来诊断电子温度等物理参量,以达到对材料表面改性过程的实时监控.工作的结果对常压介质阻挡放电及其在材料改性上的应用具有重要的意义.
Abstract
The spectral lines ofair, Helium and argon plasma emission at atmospheric pressure were recorded and analyzed.Plasma parameters, such as electron temperature, were measured. The purpose of the studyis to control the process of materials surface modification promptly. The experimental results indicatethat spectral diagnosis has been proved a workable method, and it is great importance tothe diagnosis of dielectric barrier discharge at atmospheric pressure.
唐晓亮, 邱高, 冯贤平, 闫永辉, 王良, 严治仁, 施芸城. 利用发射光谱进行常压介质阻挡放电等离子体诊断及其在材料表面改性上的应用[J]. 光散射学报, 2005, 17(1): 19. 唐晓亮, 邱高, 冯贤平, 闫永辉, 王良, 严治仁, 施芸城. Plasma Diagnostics ofDielectric Barrier Discharge at Atmospheric Pressure by Emission Spectroscopy and ItsApplication to Surface Modification of Materials[J]. The Journal of Light Scattering, 2005, 17(1): 19.