我们用显微拉曼、卢瑟福背散射谱、X射线散射和非对称摇摆等实验手段研究了在10-2到10-5帕氧气压下用激光分子束外延技术生长的BaTiO3-x薄膜的结构动力学特性.测量结果表明生长氧压越低,晶格常数c和c/a越大,晶格常数a稍微减小,晶胞体积变大.随着生长氧压的减小,薄膜中氧含量减小.在3.0×10-5帕氧气压下生长的薄膜中氧缺陷可达0.48,但是样品的四方相结构可以很好的维持.显微拉曼研究进一步确定了样品都是四方相结构.另外,在BaTiO2.52薄膜的拉曼光谱中发现高频段有两个新峰,其可能是由于氧缺陷导致的二级拉曼散射引起的.随着生长氧压的减小,拉曼峰向低频移动,表明薄膜中的应力减小.同时,拉曼峰变宽,这可能是由于氧缺陷导致的结构畸变引起的.由于在薄膜中存在二维张应力,BaTiO3单晶样品中的结构相变特征在我们的样品中从78到550K的温度范围内不存在.

Structure dynamics ofstrongly reduced epitaxial barium titanate (BaTiO_3-x) thin films were investigated byMicro-Raman scattering technique, Rutherford backscattering spectrometry, X-raydiffraction, and asymmetric rocking curves. The results indicate that lattice parameters cand c/a ratio increase while a slightly decreases with decreasing oxygen pressure,indicating increased lattice volume of BaTiO_3-x thin films. As the oxygen pressuredecreases, the oxygen deficiency increases. When deposited under 3.0×10-5 Pa, the oxygendeficiency in BaTiO_3-x film is 0.48, and tetragonal perovskite structure can be maintainedeven in this sample. Raman spectra confirm that BaTiO_3-x thin films are in tetragonalphase with some deviated features. Moreover two weak peaks in Raman spectra of BaTiO0.52thin film were observed, and maybe induced by second-order two-phonon processes. Ramanpeaks shift towards lower frequency with a decrease in deposition oxygen pressure,suggesting that the stress in BaTiO_3-x thin films decreases, in the meantime the Ramanpeaks become broader which may attributed to a higher degree of structural disorder instrongly reduced BaTiO_3-x lattice structure. Because of the two-dimensional tensile strainimposed on the film by the substrate, the phase transition characteristics for bulk BaTiO3are absent in the films over the temperature range of 78 to 550 K.