光学与光电技术, 2005, 3 (1): 53, 网络出版: 2006-05-22
表面热透镜技术测试光学薄膜特性研究
Application Research of STL Technique in Photoelectric Testing of Thin Film Characterization
表面热透镜技术 光热形变 弱吸收测量 光学薄膜 surface thermal lensing photothermal deformation weak absorption measurement optical thin film
摘要
在薄膜特性的研究工作中,激光引起的表面形变是一种广泛应用的技术.在这种技术中,薄膜的形变(热包高度小于0.1 nm)一般是采用光热偏转技术来探测的.介绍了一种通过光学衍射效应来研究薄膜表面形变的新技术即表面热透镜技术,它是研究薄膜特性的一种灵敏且易于控制的方法.探讨了其理论模型及在薄膜的吸收测量和缺陷特性测试方面,该方法相对于传统方法的优点和潜力.
Abstract
Laser-induced surface deformation is a widely used technique for studying thin film coatings. In this technique, the deformation is typically detected by using the well-known optical beam deflection technique. In this paper we report a different technique in studying the surface deformation by using optical diffraction effect. This new technique is demonstrated to be a sensitive and easy-to-handle method for thin film characterization. The potential of this technique and its advantages over the conventional methods for thin film absorption measurement and defect characteristics are discussed.
陈习权, 祖小涛, 郑万国, 蒋晓东, 黄祖鑫. 表面热透镜技术测试光学薄膜特性研究[J]. 光学与光电技术, 2005, 3(1): 53. 陈习权, 祖小涛, 郑万国, 蒋晓东, 黄祖鑫. Application Research of STL Technique in Photoelectric Testing of Thin Film Characterization[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2005, 3(1): 53.
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