光学与光电技术, 2005, 3 (3): 54, 网络出版: 2006-05-22
子孔径拼接法检测大口径光学镜面的精度分析
Accuracy Analysis of Stitching Testing for Large Aperture Flat Mirror
子孔径拼接法 平面消差 Zernike多项式拟合 精度分析 stitching interferometry plane fitting Zernike polynomials fit accuracy analysis
摘要
讨论了在用子孔径拼接法检测大口径光学镜面时的精度问题,并分别从理论上和实验中对拼接检验的精度做了定量分析.分别用平面消差、在非圆域内的Zernike多项式系数拟合和在圆域内的Zernike多项式系数拟合等三种方法对检测得到的波面面形数据进行数据处理.通过对这三种方法计算结果的分析,发现利用平面消差法拟合波面数据能更好地保存原始波面信息,且拟合误差较小.最后通过对实验数据的分析和处理验证了平面消差法拟合得到的波面更接近原始波面,拼接效果较好.
Abstract
This paper discusses the accuracy problem of testing a large aperture flat mirror by using stitching interferometry, and analyses the stitching accuracy in theory and experiment. This paper calculates all sub-aperture testing phasic data by three methods such as: plane fitting, Zernike fitting in a circular area and Zernike fitting in a non-circular area. By analysing the results obtained by these three methods, it is discovered that the plane fitting method can reserve the original phasic data best. At last, this conclusion is validated by analysing and disposeing the experimental data.
杨晓洪, 高必烈. 子孔径拼接法检测大口径光学镜面的精度分析[J]. 光学与光电技术, 2005, 3(3): 54. 杨晓洪, 高必烈. Accuracy Analysis of Stitching Testing for Large Aperture Flat Mirror[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2005, 3(3): 54.