光学与光电技术, 2003, 1 (1): 50, 网络出版: 2006-05-22  

非晶金刚石膜的性能及其应用

Properties and Applications of Amorphous Diamond (AD) Films
作者单位
西安交通大学电信学院,西安,710049
摘要
非晶金刚石薄膜具有超高硬度等一系列优异的特殊性能,为工程界孜孜追求的材料表面镀膜.用百纳科技公司研发制造的过滤阴极真空电弧离子镀膜机镀制的非晶金刚石薄膜,SP3金刚石结构量≥80%,硬度高,膜/基结合力高,摩擦系数小,耐磨损,耐腐蚀,透光率高,在电子,机械,光学,生物医学上有广泛应用前景.我们已在视窗玻璃,丝锥,模具,硬质合金刀头等产品上成功应用.
Abstract
The amorphous diamond (AD) films possess many unique features, such as high hardness, so the AD coating technology is a hardworking aim for scientist and engineer in the material surface engineering field. The filtered cathode vacuum arc (FCVA) ion plating equipment made by Shannxi Banner Technologies Company can product the typical AD films. The sp3 content in AD films are more than 80 percent. So they have high hardness, high adhesion, low coefficient of friction, wear and corrosion resistance and wave band transparency. As a result of these valuable properties, the films can be applied extensively in electronic, mechanical, optical industries and biomedicine. This coating technology has been now successfully applied to taps, moulds and cemented carbide edges productions etc.

赵玉清, 黎永钧. 非晶金刚石膜的性能及其应用[J]. 光学与光电技术, 2003, 1(1): 50. 赵玉清, 黎永钧. Properties and Applications of Amorphous Diamond (AD) Films[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2003, 1(1): 50.

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