光子学报, 2005, 34 (10): 1542, 网络出版: 2006-06-12
利用Mirau显微干涉仪测量微器件的纳米级运动
Measuring Nanoscale Motions of Microdevices Using a Mirau Interferometer
微机电系统 Mirau显微干涉仪 面内运动 离面运动 频闪照明 Microelectromechanical systems （MEMS Mirau microscopic interferometer In-plane motion Out-of-plane motion Stroboscopic illumination
摘要
描述了一种用于微机电系统(MEMS)纳米级微运动测量的Mirau显微干涉系统.该系统利用商业化的Mirau显微干涉仪,它直接安装在光学显微镜上,用于测量一个表面微加工水平谐振器的三维运动.面内运动取决于亮场在最佳焦平面处的图像,而离面运动则取决于频闪得到的干涉图像,该图像在物镜纳米定位器的8个不同位置处得到.实验结果表明了系统进行面内和离面运动测量的纳米级分辨力.
Abstract
A Mirau microscopic interferometric system for measuring three-dimensional motions of microelectromechanical systems (MEMS) with nanometer resolution is demonstrated.The system utilizes a commercial Mirau microscopic interferometer,which mounts directly on a light microscope.The system was used for full three dimensional motion measurement of a surface micromachined lateral resonator.In-plane motions were determined from stop-action bright field images taken at the best plane of focus.Out-of-plane motions were determined from stroboscopic interferograms obtained at eight different positions of the objective nanopositioner.Experimental results demonstrate nanometer resolution for both in-plane and out-of plane motions.
郭彤, 胡春光, 胡晓东, 栗大超, 金翠云, 傅星, 胡小唐. 利用Mirau显微干涉仪测量微器件的纳米级运动[J]. 光子学报, 2005, 34(10): 1542. 郭彤, 胡春光, 胡晓东, 栗大超, 金翠云, 傅星, 胡小唐. Measuring Nanoscale Motions of Microdevices Using a Mirau Interferometer[J]. ACTA PHOTONICA SINICA, 2005, 34(10): 1542.
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