论述了平行排列液晶的位相调制理论,进行了理论结果的计算模拟.研制出平行取向TFT型液晶空间光调制器并分析了其位相调制特性.结果表明,此平行取向的液晶空间光调制器可用于位相调制,其调整量优于0.7 μm,最小调整步长是0.052 μm.在ZYGO干涉仪上进行的位相控制实验,得到了很好的实验结果.

In the paper,the phase modulation of parallel aligned LC wass discussed theoretically. The theoretical results were simulated with computer.Liquid crystal spatial light modulator(LCSLM) with parallel alignment TFT was prepared.And its properties of phase modulation were investigated.The results indicated that phase was controllable in the range of applied grey levels.The depth of modulation was up to 0.7 μm.And the precision was 0.052 μm.The experiment was conducted on the ZYGO interferometer,and good results were obtained.