应用有限元方法对干涉仪的装配前后的平面反射镜进行了静力学分析,对其在重力作用下水平和垂直放置时进行了分析,通过计算镜面变形的PV值和RMS值来评价是否超差及固定反射镜的结构是否合理.并通过Zernike多项式拟合进行了数据处理,分解出了引起的像差成分,并相应地提出了提高像质的措施.

The static analysis for the flat reflector of interferometer in unassembled and assembled is studied by finite element method, horizontal and vertical placement under gravity load is analyzed. The calculated PV and RMS values are used to determine whether the distortion and the structure of fixation are reasonable or not. The datum processing is done by Zernike polynomial fittings, the aberration composition in this way is found, some corresponding approaches to improve image quality are carried out.