采用离子束辅助沉积(IBAD)真空镀膜技术制备阵列波导光栅(AWG)波导材料。以固体石英玻璃材料作为衬底,采用离子束辅助沉积真空镀膜制备SiO2膜层,以实现偏振不敏感的阵列波导光栅。实验表明器件的偏振相关性大大改善,其双折射B约为1.4077×10-5,远小于二氧化硅-硅基波导结构阵列波导光栅的双折射B=2×10-4。器件的热稳定性也得以改善,当工作环境的温度变化范围为-10～70 ℃时,采用此方法研制的阵列波导光栅最大波长漂移为1.144 nm,小于普通的二氧化硅-硅基波导结构阵列波导光栅的波长漂移1.368 nm。

Novel scheme for fabricating the arrayed waveguide grating (AWG) waveguide material using ion beam assisted deposition (IBAD) is brought forward. The substrate is quartz glass, adopting IBAD vacuum coating technology to deposit SiO2 thin films. Using this method, the intrinsically polarization-sensitivity of AWG can be overcome simply. Experimental results show that the polarization-sensitivity of AWG is greatly decreased. Waveguide birefringence B is about 1.4077×10-5, which is one order smaller than the conventional B=2×10-4 value. The thermal stability of device is also improved. In the -10 ℃～70 ℃ range, the maximum wavelength drift is 1.144 nm, which is smaller than 1.368 nm of the conventional wavelength drift.