采用合适的离子束辅助沉积(IBAD)参数在K9基底上镀制了高激光损伤阈值的中心波长1053 nm的增透膜,分别从光谱性能、吸收性能、抗激光损伤阈值(LIDT)以及退火后的影响等方面与未进行离子束辅助沉积的薄膜进行对比分析。实验结果发现,采用离子辅助制备的薄膜放置80 d后具有更好的光谱稳定性,与未进行离子束辅助镀制的薄膜相比,平均吸收下降了57%,吸收值偏高的奇异点明显减少;损伤阈值提高了60%,用Leica偏振光学显微镜观察50%损伤几率的能量下破斑形貌,发现经过离子束辅助制备的样品破斑形状整齐且缺陷点少;未进行离子束辅助制备的样品退火后吸收降低,阈值提高,但奇异点没有减少,辅助样品变化不大。由此可知,离子辅助有助于制备高性能基频增透膜。

High laser-induced damage threshold (LIDT) antireflection coatings at the center wavelength of 1053 nm were deposited on K9 glass by ion beam assisted deposition (IBAD) with certain parameters, and a comparative study was made on optical properties, absorptance, LIDT and effect of annealing. It was found that the sample deposited by IBAD had more stable optical properties after 80 days placement, the average absorption was reduced by 57%, the singularities with higher absorptance decreased, the LIDT is 60% higher than that without ion-assisted deposition (IAD) and the laser-induced damage morphology at the energy of 50% damage probability maped by nomarski microscope shows the sample with IBAD has more regular boundery and less defaults, moreover, after annealing, lower absorptance and higher LIDT but still a lot of defaults were got for the sample without IBAD, while little was changed for the sample with IBAD. So it can be conclude that IBAD is helpful for high performance optical coatings.