Chinese Optics Letters, 2004, 2 (12): 12701, Published Online: Jun. 6, 2006
Non-contact thickness measurement for ultra-thin metal foils with differential white light interferometry 
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120.0120 instrumentation measurement and metrology 120.2650 fringe analysis 120.3180 interferometry 120.4290 nondestructive testing
Abstract
A new differential white light interference technique for the thickness measurements of metal foil is presented. In this work, the differential white light system consists of two Michelson interferometers in tandem, and the measured reflective surfaces are the corresponding surfaces of metal foil. Therefore, the measuring result is only relative to the thickness but not the position of metal foil. The method is non-contact and non-destructive, it has the advantages of high accuracy, fast detection, and compact structure. Theoretical analysis and preliminary experimental verifications have shown that the technique can be used to measure the thickness of foil in the range of 1 to 80 μm with accuracy better than 0.08 μm.
Yanli Du, Huimin Yan, Yong Wu, Xiaoqiang Yao, Yongjun Nie, Baixuan Shi. Non-contact thickness measurement for ultra-thin metal foils with differential white light interferometry[J]. Chinese Optics Letters, 2004, 2(12): 12701.
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