Chinese Optics Letters, 2005, 3 (9): 09513, Published Online: Jun. 6, 2006
Study on eight-pass dual-frequency laser interferometer with nanometer precision
Abstract
A new dual-frequency laser displacement measurement interferometer with nanometer precision has been developed. An eight-pass optical subdivision technology is proposed to improve resolution based on commercial interferometers. A static positioning error measuring method has been used to examine the precision and repeatability of the laser interferometer. An optical resolution of 1.24 nm and an accuracy of nanometer scale have been achieved.
Haijun Gao, Zhaogu Cheng, Zhigao Ning, Pinjing Cui, Huijie Huang. Study on eight-pass dual-frequency laser interferometer with nanometer precision[J]. Chinese Optics Letters, 2005, 3(9): 09513.