Chinese Optics Letters, 2005, 3 (10): 10589, Published Online: Jun. 6, 2006
A novel method to determine the FOCAL energy range 
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050.0050 diffraction and gratings 100.2550 focal-plane-array image processors 120.0120 instrumentation measurement and metrology 230.0230 optical devices
Abstract
Determination of the energy range is an important precondition of focus calibration using alignment procedure (FOCAL) test. A new method to determine the energy range of FOCAL off-lined is presented in this paper. Independent of the lithographic tool, the method is time-saving and effective. The influences of some process factors, e.g. resist thickness, post exposure bake (PEB) temperature, PEB time and development time, on the energy range of FOCAL are analyzed.
Dongqing Zhang, Xiangzhao Wang, Weijie Shi. A novel method to determine the FOCAL energy range[J]. Chinese Optics Letters, 2005, 3(10): 10589.
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