1×4 MMI Splitter Based on Rib SOI Waveguide

WEI Hongzhen; YU Jinzhong; LIU Zhongli; Wang Qirning; FANG Changshui

Chinese Journal of Lasers B, 2000, 9 (6): 525, 网络出版: 2006-08-08

1×4 MMI Splitter Based on Rib SOI Waveguide

WEI Hongzhen ¹YU Jinzhong ¹LIU Zhongli ²Wang Qirning ¹FANG Changshui ³

作者单位

¹ State Key Laboratory on Integrated optoelectronics, Institute of Semiconductors, The Chinese Academy of Sciences, Beijing 100083, China

² Microelectronics center, Institute of Semiconductors, The Chinese Academy of Sciences, Beijing 100083, China

³ State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China

SOI multimode interference splitter integrated optics

摘要

Abstract

In this paper, a 1×4 MMI splitter based on silicon-on-insulator (SOI) by effective index method and guide mode method is designed. The fabrication tolerance was analyzed. The device was fabricated and near-field output was obtained.

PDF全文

WEI Hongzhen, YU Jinzhong, LIU Zhongli, Wang Qirning, FANG Changshui. 1×4 MMI Splitter Based on Rib SOI Waveguide[J]. Chinese Journal of Lasers B, 2000, 9(6): 525. WEI Hongzhen, YU Jinzhong, LIU Zhongli, Wang Qirning, FANG Changshui. 1×4 MMI Splitter Based on Rib SOI Waveguide[J]. 中国激光(英文版), 2000, 9(6): 525.

1×4 MMI Splitter Based on Rib SOI Waveguide

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