Chinese Journal of Lasers B, 2000, 9 (5): 417, 网络出版: 2006-08-08
Laser Vision Measurement System and Assessment Method for SMIC Lead Coplanarity
Laser Vision Measurement System and Assessment Method for SMIC Lead Coplanarity
摘要
Abstract
In this paper, a successful application of line-structured laser sensor, involved in SMIC chip lead coplanarity measurement, is presented. With the experimental measurement system and its corresponding mathematics model, a contact-datum-plane assessment of SMIC chip lead coplanarity is developed to provide method for on-line measurement.
SUN Changku, QIU Yu, XUE Xiaojie, YE Shenghua. Laser Vision Measurement System and Assessment Method for SMIC Lead Coplanarity[J]. Chinese Journal of Lasers B, 2000, 9(5): 417. SUN Changku, QIU Yu, XUE Xiaojie, YE Shenghua. Laser Vision Measurement System and Assessment Method for SMIC Lead Coplanarity[J]. 中国激光(英文版), 2000, 9(5): 417.
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