Chinese Journal of Lasers B, 2002, 11 (6): 440, 网络出版: 2006-08-08
Experimental Study on One-mirror-inclined Three-mirror-cavity Photodetectors
Experimental Study on One-mirror-inclined Three-mirror-cavity Photodetectors
摘要
Abstract
Research on the one-mirror-inclined three-mirror-cavity (OMITMiC) photodetectors in the laboratory is reported. In the structure of photodetectors, it is the inclined-mirror that makes the filtering cavity and the absorption cavity decoupled, thus narrow spectral response linewidth, wavelength-tunable and high quantum efficiency can be achieved simultaneously. On the basis of the theoretical analysis and experimental verification on the principle with separated optical components, the vertical taper structure, the key part in the whole integrated device was realized, by dynamic etch mask technique. Moreover, the first integrated device of this type was fabricated. A spectral linewidth less than 6 nm and a quantum efficiency of 52.6% have been achieved experimentally.
黄辉, 张瑞康, 王琦, 黄永清, 任晓敏. Experimental Study on One-mirror-inclined Three-mirror-cavity Photodetectors[J]. Chinese Journal of Lasers B, 2002, 11(6): 440. HUANG Hui, ZHANG Ruikang, WANG Qi, HUANG Yongqing, REN Xiaomin. Experimental Study on One-mirror-inclined Three-mirror-cavity Photodetectors[J]. 中国激光(英文版), 2002, 11(6): 440.