中国激光, 1999, 26 (3): 197, 网络出版: 2006-08-09
无外加氟施主产生KrF准分子发射谱实验研究
An Investigation of the KrF Excimer Emission spectrum without an Additional Fluorine Donor
无外加氟施主 聚四氟乙烯面预电离板 KrF准分子发射谱 without additional fluorine donor teflon surface preionization plate KrF excimer emission spectrum
摘要
无外加氟施主情况下,在采用聚四氟乙烯面预电离板的准分子激光器中,分别用摄谱法和光电转换扫描法对放电激发Kr/Ne混合气体产生的有关紫外谱进行了分析,确定了KrF准分子的生成。研究了发射谱随各参量的变化关系。
Abstract
Without an additional fluorine donor, the Kr/Ne mixture was excited in an excimer laser with teflon surface preionization plates. The relative UV spectrum was analyzed by ways of spectrography and opto electric scanning. The formation of KrF excimer was affirmed. The relations of emission spectrum with parameters were studied.
李昌勇, 胡天舒, 马树森, 张兆平. 无外加氟施主产生KrF准分子发射谱实验研究[J]. 中国激光, 1999, 26(3): 197. 李昌勇, 胡天舒, 马树森, 张兆平. An Investigation of the KrF Excimer Emission spectrum without an Additional Fluorine Donor[J]. Chinese Journal of Lasers, 1999, 26(3): 197.
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