介绍了一种新型的测量CCD传递函数的灵巧系统,该系统包括能产生动态变频正弦光栅图样的灵巧干涉仪系统,数据采集和转换系统,数字处理所必须的软硬件等。测量结果表明：干涉仪所产生的正弦光栅图样,可在0.2～80 line pair/mm的空间频率范围内以误差小于1%的精度实现连续变频,且信号的调制对比度接近于1。将该干涉仪产生的正弦光栅图样用作测量CCD的调制传递函数的靶标,再采用我们专门研制的数据处理的软硬件,得到了令人满意的测量结果。

This paper presents a novel miniature system for measuring modulation transfer function (MTF) of CCD. This system consists of a miniature interferometer which can generate frequencies-variable sine grating patterns, data collection and transfer subsystem, software and hardware for data processing. The measured results show that the spatial frequencies of grating patterns generated by the interferometer can be continuously changed ranging from 0.2 to 80 line pair/mm with an error lower than 1 %. The modulation contrast of patterns is close to one. We have used the sine grating patterns generated by the interferometer as targets to measure the MTF of CCD array. The results are satisfactory.