通过对一系列1.06 μm HfO2/SiO2全反膜样品进行的激光损伤阈值测试，以及二次离子质谱杂质含量测定的结果进行的比较分析，提出了减小膜系制备过程中杂质污染是提高光学薄膜激光损伤阈值行之有效的途径。将理论分析运用于具体生产实践中，获得了令人满意的结果。

In this paper, the effect of impurities in the vacuum chamber during the deposition of optical coatings on laser induced damage threshold (LIDT) of films is analysed. The quantity of impurity is tested by second ion mass spectroscopy (SIMS). By comparing the testing result, it shows that getting rid of every kinds of factors which produce impurities in the thin films is a promising way to improve the LIDT of optical coatings.