中国激光, 1999, 26 (10): 907, 网络出版: 2006-08-09
用斐索自聚焦光纤干涉仪测微区面形
A GRIN Fizeau Interferometer for the Profile Measurement of Micro-surfaces
摘要
采用LD泵浦的单纵模Nd:YVO4倍频激光器、自聚焦棒以及三维精密调整架构成斐索型干涉仪,它具有同时测量微区振动和面形的功能,着重给出了测量微区面形的实验结果和理论分析。
Abstract
A Fizeau type interferometer reported here is composed of a LD-pumped single-mode double-frequency Nd:YVO4 laser, a different-size GRIN (Gradient Index) rod lens and a 3-D fine regulation stand. It is used for the measurement of the profile, deformation and oscillatory feature of micro-surfaces simultaneously. The experimental results and theoretical analysis are given.
孙晓红, 明海, 白明, 张国平, 吴云霞, 刘旸, 梁忠诚, 谢建平, 束继祖. 用斐索自聚焦光纤干涉仪测微区面形[J]. 中国激光, 1999, 26(10): 907. 孙晓红, 明海, 白明, 张国平, 吴云霞, 刘旸, 梁忠诚, 谢建平, 束继祖. A GRIN Fizeau Interferometer for the Profile Measurement of Micro-surfaces[J]. Chinese Journal of Lasers, 1999, 26(10): 907.