设计制作了一套反转剪切干涉仪,测量了KrF准分子激光的空间相干性。用这种方法,能够一次测量激光的空间相干度,并且在不用条纹相机的条件下能够实时测量相干度随时间的变化过程。在有注入、无注入锁定及在非稳腔中经过不同路程条件下对激光的空间相干性进行了测量,并且利用变换矩阵分析了相干度在非稳腔中的传播及其演变过程,计算了激光在不同往返次数的相干带宽度。

A kind of reversal shear interferometer has been designed to measure the temporal change of spatial coherence of KrF excimer laser with an unstable resonator. By this method, we can get the spatial coherence degree from a single measurement. At different shear distance, using slit and photodetector. The stepwise increase of the spatial coherence degree at intervals equal to the transit time of the resonator was observed. Moreover, the ray matrix has been used to analyze the propagation of partial coherent light and the coherence widths of successive passes are calculated.