激光预处理是一种提高光学薄膜破坏阈值的新技术,采用小光斑扫描并逐步提高预处理能量的方法,对不同类型的薄膜进行激光预处理,实验结果发现,除了HfO2/MgF2多层反射膜外,其它样品的0几率破坏阈值F0%、发生破坏的最低能量密度值FDmin、不发生破坏的最高能量密度值FNDmax以及50%几率损伤阈值F50%都有不同程度的提高。这说明,激光预处理不仅可以清除薄膜中的杂质和缺陷,而且可以改进薄膜的整体性能。

Laser conditioning is a new technology to enhance laser damage threshold of the optical coatings. The method of the small laser spot scanning and raising of energy step by step is applied to condiation several various multi-layer reflective coatings. It is found experimentally that the damage thresholds of the reflection coatings, except of HfO2/MgF2 multi-layer coating, such as zero-probability damage threshold F0%, minimum damage energy density FDmin, maximum not damage energy density FNDmax and 50% probability damage threshold F50% are all enhanced. It means that laser conditioning technology not only can eliminate the impurities and defects in the coating, but also can improve the whole properties of the coating.