激光与光电子学进展, 2001, 38 (4): 40, 网络出版: 2006-08-10
微光学电子机械系统中的微型反射镜阵列的应用前景
An Analysis on the Applications of MOEMS Micromirror Arrays
摘要
综述利用微加工技术制作微型反射镜阵列 ;简要叙述其发展历程 ,着重阐述其主要功能和优点。分类分析微镜阵列的基本工作方式和主要应用领域及其发展方向 ,并对应用前景进行分析。
Abstract
The micromirror arrays using MOEMS(micro opto electro mechanical system) fabrication process are reviewed. The history of the development,the basic function and the advantages of the micromirror arrays are presented briefly. Their future applications and the future market are analysized.
蒋军彪, 韩宗虎. 微光学电子机械系统中的微型反射镜阵列的应用前景[J]. 激光与光电子学进展, 2001, 38(4): 40. 蒋军彪, 韩宗虎. An Analysis on the Applications of MOEMS Micromirror Arrays[J]. Laser & Optoelectronics Progress, 2001, 38(4): 40.