采用溶胶-凝胶金属氧化物半导体薄膜,作为表面等离子体激元共振效应的光化学传感器的传感介质。分析了金属Ag膜与传感薄膜的光学参数对传感器灵敏度的影响。通过在金属层与传感层之间优化设计中间层,进一步提高了传感器灵敏度。选择SnO2薄膜及SiO2薄膜作为传感层与中间层,对三种气体NH3、C2H5OH、C3H8进行气敏实验,结果表明结构优化的传感器具有更高的灵敏度。

The metal oxide semiconductor films have been used as sensing medium in the opto-chemical sensor based on surface plasmon resonance. The influence of the optical parameters of Ag and sensing films on the sensor sensitivity is analyzed. By optimizing the optical parameters of intermediate layers between the metal films and the sensing films, the sensitivity can be increased further. Experimentally, SnO2 and SiO2 films were selected as sensing and intermediate layers and the gas sensing tests to NH3、C2H5OH and C3H8 were made. The results indicate the sensor with optimized structure has a higher sensitivity.