从理论上分析了硅基二氧化硅光波导器件的芯区尺寸、相对折射率差、内应力和弯曲半径对器件偏振特性的影响,得出结论：小折射率差的正方形波导的双折射系数小;内应力对双折射的影响比几何参数大;弯曲半径较小时,双折射系数较大,弯曲损耗也较大。

The influence of core size, relative refractive index difference, stress and bending radius of silicon-based silica waveguides on polarization was analyzed. Conclusions were drawn as below: the birefringence of square waveguide with small relative index difference is small. The birefringence caused by residual stress is larger than that by core size. Small bending radius causes high birefringence and loss, so large bending radius is preferred within the permission of chip size to reduce birefringence.