激光与光电子学进展, 2006, 43 (8): 27, 网络出版: 2006-08-31
全硅片上光互连用波导
Optical Waveguide for On-Chip Interconnect
光电子集成 光波导 互补型金属氧化物半导体(CMOS) 硅 optoelectronic integration optical waveguide complementary metal-oxide semiconductor(CMOS) silicon
摘要
较详细地分析了用于全硅片上光互连所用光波导(如多晶 Si/ SiO2、Si/ SiO2、Si3N4/SiO2)需满足的基本条件、制作方法以及损耗机制, 总结了目前的研究进展。
Abstract
The waveguides (poly Si/ SiO2, Si/SiO2, Si3N4/SiO2) for on-chip optical interconnect have been analyzed in detail, including the basic conditions, fabrication method and loss mechanism. The recent progress is summarized.
代晓光, 牛萍娟, 张宇, 陈弘达, 毛陆虹, 郭维廉. 全硅片上光互连用波导[J]. 激光与光电子学进展, 2006, 43(8): 27. 代晓光, 牛萍娟, 张宇, 陈弘达, 毛陆虹, 郭维廉. Optical Waveguide for On-Chip Interconnect[J]. Laser & Optoelectronics Progress, 2006, 43(8): 27.