Chinese Optics Letters, 2006, 4 (9): 550, Published Online: Sep. 14, 2006
Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors Download: 545次
220.0220 Optical design and fabrication 230.0230 Optical devices 310.0310 Thin films 340.0340 X-ray optics
Abstract
X-ray supermirror is a non-periodic multilayer structure, whose optical performance is greatly affected by the stability and accuracy of the deposition rate in the fabrication using the direct current (DC) magnetron sputtering. By considering the location-setting time of the substrate positioning above the sputtering target, the deposition rate can be accurately determined. Experimental results show that the optical performance of the supermirror is in agreement with the design aim, which indicates that the layer thickness is well controlled and coincides with the desired ones.
Fengli Wang, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, Lingyan Chen. Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors[J]. Chinese Optics Letters, 2006, 4(9): 550.