中国激光, 1998, 25 (4): 303, 网络出版: 2006-10-18
确定KrF激光光束品质的光楔法
An Optical Wedge Method for Determination of KrF Laser Beam Quality
KrF激光 光楔法 分光 能量分布 远场发散角 均匀性 KrF laser optical wedge method optical wedge beam splitting energy distribution far field divergence angle uniformity
摘要
运用光楔对发散角较大、光束品质不够好的KrF激光光束进行了分光测量,测量了KrF激光光束的一维能量分布和远场发散角;具体计算了KrF激光光束剖面的能量密度分布的均匀性。
Abstract
The optical wedges are designed for the measurement of the vacuum ultraviolet laser beam with a large divergence angle and not so good beam quality. Two wedges have been made and constructed, then applied for splitting and measuring a KrF laser beam. Treatment for experimental data obtained has two ways which constitute a complete description of the KrF laser beam: after drawing a one dimensional energy distribution graph of the laser beam we measured the far field divergence angle;then we calculated the uniformity of energy distribution of the KrF laser beam cross section, for this goal, an analysing program has been developed on the bases of the image analyser Magiscan (2).
夏江帆, 王乃彦. 确定KrF激光光束品质的光楔法[J]. 中国激光, 1998, 25(4): 303. 夏江帆, 王乃彦. An Optical Wedge Method for Determination of KrF Laser Beam Quality[J]. Chinese Journal of Lasers, 1998, 25(4): 303.