光学学报, 1998, 18 (1): 90, 网络出版: 2006-10-18
衍射光强取样分析法测定划痕宽度:实验部分
Measuring Scratch Width by Sampling Diffracted-Light Intensity: Experiment
摘要
根据衍射光强取样分析法理论部分的测量原理设计了一套实验方案,比较了该方法与轮廓仪、显微镜对划痕实际宽度的测试结果,给出了其相对测量误差,并分析了误差的主要来源。该方法速度快,精度高,有推广和应用的价值。
Abstract
An experimental arrangement has been built for measuring scratch width by sampling diffracted-light intensity. Using this arrangement, several specimen are measured, and the scratches widths can be obtained efficiently and quickly. In general case, the measuring error is smaller than ±15%.
戴名奎, 徐德衍, 沈卫星. 衍射光强取样分析法测定划痕宽度:实验部分[J]. 光学学报, 1998, 18(1): 90. 戴名奎, 徐德衍, 沈卫星. Measuring Scratch Width by Sampling Diffracted-Light Intensity: Experiment[J]. Acta Optica Sinica, 1998, 18(1): 90.