光学学报, 1998, 18 (4): 474, 网络出版: 2006-10-18
测量金属膜粗糙度的表面等离子激元光谱方法
Surface Plasmon Spectroscopy for Measuring the Surface Roughness of Metallic Films
表面等离子激元 随机粗糙表面 表面极化电流密度 空间散射光强分布 surface plasmon stochastic roughness surface surface polarization current density scattering light intensity distribution
摘要
介绍了确定金属膜表面粗糙度的表面等离子激元光谱方法。测量了二种银膜(棱镜/银膜/空气和棱镜/LB膜/银膜/空气)在表面等离子激元激发条件下的光散射强度分布。通过与理论计算的拟合,得到了描写这二种银膜空气随机粗糙界面的特征参数。
Abstract
A method for determining the surface roughness parameters of metal film with surface plasmon spectroscopy is proposed. The angular distribution of scattering light intensity from two kinds of silver films, prism/silver film/air and prism/LB film/silver film/air was measured under the condition that surface plasmon was excited between the silver and air. By fitting the experiment data with calculating curves of theory, the characterization parameters for stochastic roughness interface were obtained.
邓里文, 王恭明. 测量金属膜粗糙度的表面等离子激元光谱方法[J]. 光学学报, 1998, 18(4): 474. 邓里文, 王恭明. Surface Plasmon Spectroscopy for Measuring the Surface Roughness of Metallic Films[J]. Acta Optica Sinica, 1998, 18(4): 474.
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