光学学报, 1998, 18 (6): 808, 网络出版: 2006-10-18
硅基光导波结构的特性研究
A Study of Properties of Optical Guided-Wave Structure Based on Silicon
光波导 硅基底 氮氧化硅 集成光学 光电子集成 optical waveguide silicon matrix SiON integrated optics optoelectronic integrated circuit (LEIC)
摘要
研究了在硅基底上采用等离子增强化学汽相淀积(PECVD)氮氧化硅(SiON)所形成的包括通道波导、条波导、倒脊型波导等多种结构的特性。通过对测试结果进一步分析,总结出有关结论并提出一些改进方法。
Abstract
The properties of SiON optical waveguides based on silicon formed by plasma-enhanced chemical vapor deposition are discussed, and the structures of channel waveguide, strip waveguide, inverted ridge waveguide are designed. The results of technical fabrication are analysed, and some improvming methods are presented.
祖继锋, 马忠礼, 余宽豪, 陈学良, 耿完桢. 硅基光导波结构的特性研究[J]. 光学学报, 1998, 18(6): 808. 祖继锋, 马忠礼, 余宽豪, 陈学良, 耿完桢. A Study of Properties of Optical Guided-Wave Structure Based on Silicon[J]. Acta Optica Sinica, 1998, 18(6): 808.
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