光学学报, 1998, 18 (12): 1721, 网络出版: 2006-10-18
光学轮廓仪对光学元件表面空间波长回应的研究
Response of Optic profiler to Spatial Wavelength of Optical Element Surface
摘要
在分析光学轮廓仪的空间分辨率和带限功率谱密度函数的基础上,用所测不同样品的大量数据研究了光学元件表面粗糙度测量与光学轮廓仪对表面空间波长的带限回应关系。对由光学轮廓仪不同带宽限制内测量元件表面粗糙度有不同回应所引起不同偏差的解决办法提出了几点建议。
Abstract
The relation between roughness measuring of optical elements and the bandlimit response of the profiler used in the measuring is discussed. The analysis is based on a lot of data from the different samples. Some proposals are put forward for solving deviation induced by surface roughness measuring in different surface spatial wavelength scope using optic profiler.
徐德衍, 沈卫星, 林尊琪. 光学轮廓仪对光学元件表面空间波长回应的研究[J]. 光学学报, 1998, 18(12): 1721. 徐德衍, 沈卫星, 林尊琪. Response of Optic profiler to Spatial Wavelength of Optical Element Surface[J]. Acta Optica Sinica, 1998, 18(12): 1721.
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