Chinese Journal of Lasers B, 1998, 7 (6): 491, 网络出版: 2006-10-18
Optical Automatic Focusing with Interference Fringes
Optical Automatic Focusing with Interference Fringes
摘要
Abstract
A new optical automatic focusing technique based on laser interference principle is proposed. The object wave passing through the imaging lens interferes with the reference wave. Information out of focus can be obtained from the interferograms, specifically from the shifting of interference fringes. The focusing movement of the optical system is driven by an electronic system consisting of a CCD detector, microcomputer and stepping motor. The meachanism of automatic focusing is readily to be interpreted. The novel system has been applied to the instrument for testing the resolving capability of imaging materials. The focusing accuracy can reach 0. 3 μm in the system.
LIU Tiegen, ZHANG Fenglin, R. A. Lessard. Optical Automatic Focusing with Interference Fringes[J]. Chinese Journal of Lasers B, 1998, 7(6): 491. LIU Tiegen, ZHANG Fenglin, R. A. Lessard. Optical Automatic Focusing with Interference Fringes[J]. 中国激光(英文版), 1998, 7(6): 491.