光子学报, 2006, 35 (3): 0347, 网络出版: 2010-06-03
MSM光探测器瞬态特性的二维分析及优化设计
Analysis and Optimization of MSM-PD's Characteristics Using a Two Dimensional Numerical Method
MSM光探测器 有限差分 二维分析 瞬态响应 优化设计 MSM photodetector Finite difference method 2D Transient response Optimization Si Si
摘要
应用有限差分方法对金属-半导体-金属光探测器进行二维分析,全部数值模拟工作都是基于半导体物理的基本微分方程完成的.结合模拟结果对金属-半导体-金属光探测器的瞬态响应进行了分析,以特性分析结果为基础针对探测器的响应速度和响应率等性能指标进行了二维结构上的优化设计.
Abstract
A 2D finite-difference method is developed to study a Metal-Semiconductor-Metal PhotoDetector (MSM-PD). The time-domain numerical simulation is based on the Poisson equation and continuity equations for electrons and holes. The transient response of the photodector is analyzed. An optimized design of MSM-PD is given to achieve a fast response while keeping a satisfactory responsivity.
于弋川, 邹勇卓, 何建军, 何赛灵. MSM光探测器瞬态特性的二维分析及优化设计[J]. 光子学报, 2006, 35(3): 0347. Yu Yichuan, Zou Yongzhuo, He Jianjun, He Sailing. Analysis and Optimization of MSM-PD's Characteristics Using a Two Dimensional Numerical Method[J]. ACTA PHOTONICA SINICA, 2006, 35(3): 0347.