光子学报, 2006, 35 (4): 0611, 网络出版: 2010-06-03
大口径干涉仪装置的调整及支承机构
The Adjustment and Shore for the Large Aperture Interferometer
大口径干涉仪 蜗轮蜗杆驱动 同步带安装标准镜片 正交十字导轨 调整准确度 Large aperture interferometer Gear/worm transferring Synchronous strip/gear installing Perpendicular cross guiding rail Adjusting accuracy
摘要
采用蜗轮蜗杆驱动调整机构、使用同步带安装标准镜片方式、正交十字导轨支撑等可有效提高光学精密检测系统中大口径干涉仪装置的镜面面形质量、稳定性和调节准确度,从理论上介绍了蜗轮蜗杆驱动机构等设计原理及其基本公式,并从实验上验证了这些机构对光学精密检测系统稳定性的影响.
Abstract
In this article,the adoption of gear/worm transferring,synchronous strip/gear installing method and perpendicular cross guiding rail which applied in the large aperture interferometer are described. By use of the method could be improved the system's stability and adjusting accuracy as well as the quality of the standard mirror face shape. The design principle and basic formulas of driving devices are introduced theoretically,and by experiments the devices' influence upon the stability of system is proved.
汤更秀, 刘志刚, 王聪瑜, 庞向阳, 朱健强. 大口径干涉仪装置的调整及支承机构[J]. 光子学报, 2006, 35(4): 0611. Tang Gengxiu, Liu Zhigang, Wang Congyu, Pang Xiangyang, Zhu Jianqiang. The Adjustment and Shore for the Large Aperture Interferometer[J]. ACTA PHOTONICA SINICA, 2006, 35(4): 0611.