光子学报, 2006, 35 (8): 1191, 网络出版: 2010-06-03
周期性梯度折射率多层膜的软X射线反射率
Soft X-Ray Reflectivity of Periodic Graded-index Multilayers
摘要
由于界面互扩散的存在,实际的超薄多层膜很难具有清晰的界面结构.假设超薄多层膜为具有周期性梯度折射率的多层膜结构,用直线模型和余弦模型模拟了周期性梯度折射率多层膜的软X射线反射率.结果证明,折射率余弦渐变的多层膜虽然不具有清晰的界面,但它同样具有很高的反射率.
Abstract
Actual ultra thin multilayers are difficult to have a clear-cut interface due to interface interdiffusion. It is assumed that ultra thin Multilayers have a periodic graded-index multilayer structure.A line model and a cosine model are used to simulate soft X-ray reflectivity of periodic graded-index multilayers. The simulations show that periodic graded-index multilayers with cosine model have a higher reflectivity. it's significative for design of ultra thin Multilayers.
秦俊岭, 易葵, 邵建达, 范正修. 周期性梯度折射率多层膜的软X射线反射率[J]. 光子学报, 2006, 35(8): 1191. Qin Junling, Yi Kui, Shao Jianda, Fan Zhengxiu. Soft X-Ray Reflectivity of Periodic Graded-index Multilayers[J]. ACTA PHOTONICA SINICA, 2006, 35(8): 1191.