Chinese Journal of Lasers B, 1997, 6 (1): 57, 网络出版: 2006-10-31
Novel Method for Making MicroopticsElements with Continuous Relief
Novel Method for Making MicroopticsElements with Continuous Relief
摘要
Abstract
We intreduce the moving-mask method for fabrication of microoptics elements(MOE) with continuous relief in this paper. With only one mask engaged, we obtained a continuous relief with line-symmety or rotation-symmetry several kinds of MOE have been made by using this method such as blazcd grating, parabolic grating, cylindrical lens, et al., experimental results are given.
CHEN Bo, GUO Lurong, TANG Jiyue, GUO Yongkang, ZHOU Mingbao. Novel Method for Making MicroopticsElements with Continuous Relief[J]. Chinese Journal of Lasers B, 1997, 6(1): 57. CHEN Bo, GUO Lurong, TANG Jiyue, GUO Yongkang, ZHOU Mingbao. Novel Method for Making MicroopticsElements with Continuous Relief[J]. 中国激光(英文版), 1997, 6(1): 57.
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