光学学报, 1997, 17 (3): 351, 网络出版: 2006-10-31
衍射光强取样分析法测定划痕宽度:理论部分
Measuring Scratch Width by Sampling Diffracted Light Intensity: Theory
摘要
在理论上分析了截面为矩形、三角形和余弦形的划痕的衍射花样的相似性,并在此基础上提出了一种测定划痕宽度的衍射光强取样分析法。本文还就消除光阑衍射光及粗糙度散射光的干扰提出了行之有效的措施。
Abstract
The similarity of scratches diffraction patterns with different cross section, rectangular, triangular and cosinoidal, is discussed. A new method, sampling the diffracted light, to measure the scratch width is proposed.
戴名奎, 徐德衍. 衍射光强取样分析法测定划痕宽度:理论部分[J]. 光学学报, 1997, 17(3): 351. 戴名奎, 徐德衍. Measuring Scratch Width by Sampling Diffracted Light Intensity: Theory[J]. Acta Optica Sinica, 1997, 17(3): 351.
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