给出了利用红外透射光谱计算金刚石薄膜中SP2/SP3键价比,从而判断金刚石薄膜质量的判断技术。这种方法给出了薄膜质量的定量判断,甚至当由于灵敏度限制拉曼光谱无法给出判断结果时这种方法仍可使用。文中给出了两个金刚石薄膜样品的计算结果并和非晶碳膜进行了比较。

A diagnostic technique utilizing infrared transmission spectroscopy for calculating the ratio of SP2/SP3 bonds in diamond thin films is presented. This method allows a quantitative assessment of the quality of films, even when analysis of Raman spectra would give ambiguous results because of sensitivity limitations. Sample calculations comparing two diamond films and amorphous carbon are presented.