光学学报, 1996, 16 (8): 1215, 网络出版: 2006-12-04
He+离子注入LiNbO3晶体波导的制备及其性能研究
Study on Property and Formation of He+Ions Implanted LiNbO3Waveguide
摘要
报道了液氮温度下He+离子注入iNbO3波导的制备，采用棱镜耦合法测量了波导退火前后各导模的有效折射率，计算了波导层折射率的分布和晶体中He+离子的射程分布和损伤分布，两者吻合得较好。
Abstract
Fabrication of LiNbO 3 crystal waveguides implanted by He + ions is reported in this paper. The effective refractive index of the guided modes were measured before and after annealing. The refractive index profiles were calculated and proved to be in agreement with the damage profile and range profile.
卓壮, 王克明, Y. T. Chow, 李健, 王象泰. He+离子注入LiNbO3晶体波导的制备及其性能研究[J]. 光学学报, 1996, 16(8): 1215. 卓壮, 王克明, Y. T. Chow, 李健, 王象泰. Study on Property and Formation of He+Ions Implanted LiNbO3Waveguide[J]. Acta Optica Sinica, 1996, 16(8): 1215.
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