报道了分布布拉格反射镜(DBR)中具有渐变层的垂直腔面发射激光器的研究结果。器件是采用钨丝掩膜两次质子轰击方法制备的。该方法是目前报道的垂直腔面发射激光器制作方法中最简单的。初步的实验已实现室温宽脉冲高占空比激射, 最低阈值为18 mA, 最大峰值功率大于2 mW, 激射波长为871 nm, 串联电阻一般为100～200 Ω。

A novel vertical-cavity surface-emitting laser with grading DBR is reported in this paper.The structure is obtained by twice deep H+ implantations which use a crossed tungsten wire as the implantation mask. The fabrication process is the simplest ever reported in vertical-cavity surface-emitting lasers fabrications.In the primary experiment,the lasing wavelength of 871 nm,the lowest threshold current of 18 mA and the largest output power of 2 mW are obtained under pulse condition at room temperature using a current source with a 10 μs pulse-width and 100 μs cycle. The series resistances of the device are 100～200 Ω.