中国激光, 2006, 33 (12): 1680, 网络出版: 2006-12-30   

铬过渡层对银膜光学性质及附着力的影响

Effect of Cr Interlayer on the Optical Properties and Adhesion of Ag Films
作者单位
1 中国科学院上海光学精密机械研究所, 上海 201800
2 中国科学院研究生院, 北京 100039
摘要
研究了在玻璃基底上采用不同厚度的铬膜作过渡层,对银膜的光学性质及其附着力的影响。光谱测量结果表明,随着铬膜层厚度的增加,银膜的反射率先增大后减小。与直接镀在玻璃基底上的银膜的反射率相比,铬膜层厚度为8~14 nm时,银膜的反射率较低; 铬膜层厚度为17~21 nm时,银膜的反射率得到提高,其中铬膜厚度为17 nm时,银膜的反射率最高; 继续增加铬膜层的厚度,银膜的反射率又降低,说明采用一定厚度的铬膜作过渡层可以提高银膜的反射率。X射线衍射(XRD)结构分析表明,一定厚度的铬膜改善了银膜的结晶程度,使薄膜的晶粒度增大,晶界散射及缺陷减少,从而使应变减小。剥落实验证明薄膜与玻璃基底之间的附着力也得到了提高。
Abstract
Optical properties and adhesion of Ag films with Cr interlayer of different thickness on glass substrates were investigated by using spectrophotometer and X-ray diffraction (XRD). The spectra results showed that the reflectivity of Ag films increased with the thickness of Cr interlayer increasing from 8 to 17 nm and then decreased with increasing Cr film thickness to 24 nm. Compared with pure Ag films on glass substrates, the reflectivity of Ag films with 17~21 nm Cr interlayer was higher and that of Ag films with 8~14 nm and 24 nm Cr interlayer was lower. Thus, the reflectivity of Ag film can be promoted by introducing a certain thickness of Cr interlayer. The XRD analysis showed that with a certain thickness of Cr interlayer, the crystalline grains increased, intergranular defects and scattering decreased, and so the strain decreased. The adhesion was also improved by using the tape test method.

孙喜莲, 邵建达. 铬过渡层对银膜光学性质及附着力的影响[J]. 中国激光, 2006, 33(12): 1680. 孙喜莲, 邵建达. Effect of Cr Interlayer on the Optical Properties and Adhesion of Ag Films[J]. Chinese Journal of Lasers, 2006, 33(12): 1680.

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