研制了一种新型的超小型电磁驱动微机械可调光衰减器(VOA)．该器件采用电磁驱动器转动硅基微镜改变光路实现可调衰减，在结构上采用了全磁性回复，完全摆脱了通常的弹性回复造成的部件疲劳、零点偏移等器件重复性问题．驱动电压为0～5 V，工作范围0～40 dB，插入损耗小于0．8 dB，回波损耗小于－50 dB．器件重要部件采用微细电火花加工(EDM)技术制作，并应用FEA软件进行了结构优化，对衰减响应进行了详尽的理论分析．该VOA设计体积仅为25×10×7mm³，可构成阵列应用于波分复用(WDM／DWDM)系统中各信道的动态信号平衡或网络保护．

A novel design of micro-machined variable optical attenuator (VOA) with a packaged size as small as 25 × 10 × 7 mm³ is presented. Attenuation was introduced by a rotatable miniature silicon mirror,with its orientation finely adjusted through the balance between a pair of electromagnetic forces. The design is free of conventional spring restoring force for attenuation reset and therefore ensures a high stability. The realizing structure was fabricated by EDM micro-machining as well as laser spot welding. VOA prototypes exhibit a wide attenuation range of 40 dB with an insertion loss of 0.8 dB and backreflection of －50 dB. The measured result was compared with that of an FEA model using ANSYS software package and a good agreement was obtained. The VOA can be arrayed for effective signal balancing and device protection in WDM/DWDM network systems.