研究了以氧化镁(MgO)为牺牲层材料制作热成像阵列器件过程中MgO膜层在磷酸溶液中的湿法腐蚀特性，包括横向腐蚀速率和纵向腐蚀速率，获得了MgO膜层的腐蚀速率随磷酸溶液浓度和温度变化的关系曲线，并得到了用于制作图形和制作悬空结构的较好工艺参量．

In this paper,the wetting eroding properties of MgO films,used as sacrificial layer materials,was researched in H₃ PO₄ solution,including the transverse eroding speed and vertical eroding speed. The relationships between the eroding speed of MgO films in H₃ PO₄ solution and the temperature and concentration of H₃PO₄ solution were obtained,and the better technical parameters were obtained for the manufacturing of the MgO films graphs and the holding structure in which MgO is used as sacrificial layer materials.