采用溶胶-凝胶法制作波导环形谐振腔, 讨论了环形谐振腔器件的传输特性。测量了在不同物质、不同体积分数的挥发性有机化合物(VOC)蒸气气氛下器件的传输光谱的敏感性。结果表明, 谐振波长随甲醇、乙醇、丙醇等醇类化合物, 以及丙酮、甲醛等蒸气体积分数的上升而向长波方向移动, 具有高的灵敏度, 且两者基本呈线性关系。其中, 对丙醇最敏感, 灵敏度达到1.403 pm/10-6。对甲烷和二甲苯也有微弱反应, 但是其灵敏度很低。也测量了水蒸气对传输谱特性的影响。观察到传输谱衬比度对不同挥发性有机化合物物质蒸气的不同敏感特性。对传感机制进行了讨论。

A planar waveguide ring resonator was fabricated by organic-inorganic hybrid Sol-Gel materials, its transmission characteristics were disccused. Sensitivities of its transmission spectra were measured under different concentrations of different volatile organic compounds (VOCs). The resonant peak shifted towards longer wavelength with the increasing volume fraction of methanol, ethanol, propyl alcohol, acetone and formaldehyde with high sensitivities and linear relations. Among them, the device has highest sensitivity to propyl alcohol of 1.403 pm/10-6. The device was found to have low sensitivities to xylene and methane. The influence of water vapor to the spectra was also measured. Meanwhile, the reaction of the contrast of resonant curve to the VOC vapor was observed as well. Mechanism of the sensitivity is discussed in the paper.