Chinese Optics Letters, 2005, 3 (0s): 290, Published Online: Mar. 5, 2007  

Nondestructive determination for the thickness of spin-coated polymer films by transparent coefficient Download: 533次

Author Affiliations
1 Adavnced Photonics Center, Southeast University, Nanjing 210096
2 Department of Electronics and Information, Huaiyin Institute of Technology, Huaian 223001
Abstract
Polymer films thickness is one of the critical factors for the operation performance of the integrated optical devices (IODs) based on polymer planar waveguides and it is difficult to real-time determine it during corresponding fabrication process. A variety of approaches, which have been presented before, are either of less precision or more contamination of the film surfaces. In this paper a practical method, in which the absorbance of the polymer film using Lanbert law to determine the thickness of spin-coated polymer films, was presented. Compared with other methods, it can get an acceptable accuracy without using specialized and expensive instruments, and the surface of the film with not be contaminated during the measurement process. The experimental results compared with other methods were listed and depicted in confirming our method's availability. The factors that may have influence on the employment of our method were analyzed and discussed.

Mahua Wang , Yonghong Wu, Yang Ji, Yiping Cui, Tong Zhang. Nondestructive determination for the thickness of spin-coated polymer films by transparent coefficient[J]. Chinese Optics Letters, 2005, 3(0s): 290.

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