Collection Of theses on high power laser and plasma physics, 2004, 2 (1): 18, Published Online: Jun. 1, 2007
Broadband and Scratch-Resistant Antireflective Coating Composed of SiO2/TiO2 Prepared from Sol-Gel Processing
薄膜物理学 溶胶-凝胶 宽带增透膜 表面均匀 耐擦除 film physics sol-gel broadband antireflective coatings even surface scratch-resistant
Abstract
type of λ/4～λ/2 broadband antireflective coating has been developed by sol-gel dipping method with tetrabutylorthotitanate and tetraethoxysilane (TEOS) as precursors. This antireflective coating possesses smooth and even surface,its average roughness is estimated having the value of RMS (1.201) and RA (0.934),and the specific scratch-resistant is good. Most -OH groups are eliminated at the temperature near 200 ℃. The average transmission of both-coated K9 substrate is increased 6.6% higher than uncoated one in the spectra from 400 nm to 700 nm. The antireflective coating is expected to coat amplifier blastshields of "Sheng-Guang: facility for enhancing the pumping efficiency of amplifiers
Qiaoying Jia, Yueqin Le, Yongxing Tang, Zhonghong Jiang. Broadband and Scratch-Resistant Antireflective Coating Composed of SiO2/TiO2 Prepared from Sol-Gel Processing[J]. Collection Of theses on high power laser and plasma physics, 2004, 2(1): 18.
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